PLASMA-THERM DUAL PLASMA ETCH AND REACTIVE ION ETCH SYSTEM 200MM
Dual Plasma Etch and Reactive
Ion Etch Processing Systems
System consists of a process chamber, upper electrode (with gas feed), and substrate electrode.
In addition to this Plasma-Therm Wafer Batch 740/740, Capovani Brothers Inc stocks a wide range of used and refurbished plasma etching
equipment including RIE, ICP and DRIE plasma etch tools.
Typical manufacturers include
LAM Research, March Instruments,
Surface Technology Systems, Tegal, and Trion Technology.
To view our complete stock of used plasma etch tools visit our Plasma Etch Equipment categories.
This used plasma etching tool and all the other used and refurbished semiconductor, scientific, and laboratory equipment listed on this website
are owned by Capovani Brothers Inc. and stored at our facility in Scotia, NY.
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