Barrel/Box Plasma Etchers
BRANSON TEPLA PVA PLASMA ETCHER 1000 WATT
Plasma Etcher
Plasma Etching Equipment
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Metal Etchers
TECHNICS PLASMA ETCHER 200 WATT 13.65 MHz
Technics Micro Stripper Series 200 Plasma System
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Barrel/Box Plasma Etchers
TEPLA PLASMA ETCHER 4000 WATT
Planar Plasma Etcher
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Cluster Plasma Tools - Metal
ULVAC FERROELECTRIC ETCHER
Like New Condition System installed in October of 2007, decommission in Feburary of 2008. Used in a R&D application The Ulvac NE 7800 is a high-temperature, high-density plasma etching system utilizing an Inductive Super Magnetron source (ICP with magnetic field). The NE 7800 is a dual load locked, cassette to cassette system designed for both R&D and production applications. Outstanding metal etching process stability for Pt/Ir/magnetic films and difficult to etch materials such as FeRAM and MRAM devices.
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Cluster Plasma Tools - Oxide
TRION TECHNOLOGY DIELECTRIC CLUSTER TOOL
Dielectric Cluster Tool Trion Technology Oracle
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Barrel/Box Plasma Etchers
APS MARCH B SERIES-4 PLASMA TREATMENT SYSTEM.
Plasma Treatment System Desmear/Etchback Advanced Plasma Systems and March Instruments, manufacturer of plasma systems, were aquired by Nordson. Both companies merged and are an entity of Nordson - now called Nordson MARCH.
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Barrel/Box Plasma Etchers
MARCH INSTRUMENTS BARREL PLASMA ETCHER 300 WATT
Barrel Plasma Etcher with Vacuum PumpMarch Instruments, manufacturer of plasma systems, was acquired by Nordson - called Nordson MARCH.
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Poly/Nitride Etchers
PLASMATHERM ICP PLASMA ETCHER
Inductively Coupled Plasma Etcher with 9.5 Inch Electrode
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Poly/Nitride Etchers
LAM RESEARCH SIX INCH NITRIDE ETCHER
Six Inch Nitride Etcher Automated Cassette to Cassette single wafer etching.
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Barrel/Box Plasma Etchers
MARCH NORDSON BOX PLASMA ETCHER 600 WATT 13.56 MHZ
Box Plasma Etcher
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Barrel/Box Plasma Etchers
PLASMA-FINISH GMBH PLASMA ETCHER SYSTEM 300 WATT
Plasma Box Etcher System
PINK GmbH acquired Plasma-Finish - now called PINK GmbH Plasma-Finish
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Metal Etchers
PLASMATHERM BatchTop VII REACTIVE ION ETCH SYSTEM 6"
Reactive Ion Etch System
BatchTop VII