USHIO SUS 55
Excimer VUV/03 Cleaning Unit UV Cleaning Applications:
- Enhancement of wetability and adhesion of photoresist
- Enhancement of wetability of SOG
- Cleaning before deposition process
- Soft ashing
- High-speed removal of static electricity
- Cleaning of reticles Features:
- Simple dry cleaning allows removal of most of organic matter
- No charging damage
- Instantaneous on/off operation suited to single-wafer process
- Low-temperature process
- Cleaning process can be performed under atmospheric air
1 unit @ Best Price
MAKE: USHIO, Inc.
MODEL: SUS 55
CATEGORY: Other Lamps
SPECS
Manufacturer | USHIO, Inc. |
Model | SUS 55 |
Description | Excimer VUV/03 Cleaning Unit |
Lamp Type & Power | Ultra-Violet/ 3 required |
Wavelength Maximum | 172 nm |
Interface | Other |
External Cooling | Water Cooled |
Other Information | Lamp House Model HO237: |
Power Requirements | 110 V 50/60 Hz 1 Phase |
Condition | New-Never Used |
Weight | 100 lb (45 kg) |
S&H
Our standard procedure is to service the equipment as orders are placed. Lead times can vary depending on the item.
Domestic and International shipments: Ex Works, Scotia, NY. All freight cost estimates are for dock to dock service only.
Any additional services, i.e. lift-gate, inside or residential delivery, must be requested at the time of sale and will be billed accordingly.
CBI is not responsible for any damage incurred during shipment. It is the buyer's responsibility to inspect packages for damage and to note any damage on bill of lading.
Please feel free to call us with any questions. (Phone: 518.346.8347, 844-833-8347, Fax: 518.381.9578).
Payment
We offer terms of net 30 days to all companies that have established credit with Capovani Brothers Inc. and have paid within terms.
All federal, state, local governments and their agencies, as well as institutions of higher learning automatically receive terms.
All other sales, including foreign sales, are prepayment only.
MasterCard, VISA, Discover and AMEX are accepted at sellers discretion.
International Terms and Conditions