Robotic PR Coater Tracks
Robotic PR Coater Tracks
Automated Coating and Developing Cluster System
Fully Automated High Throughput Coating, Developing Cluster System System configured for Anti-reflective coating (A.R.C) and Ebeam Resist.
Mask Aligners: Contact/Proximity
Manual Mask Aligner The Karl Suss MA 150M Manual Mask Aligner is a mask alignment and exposure system which offers unsurpassed precision and versatility when handling wafers up to 150 mm in diameter.
Mask Aligners: Contact/Proximity
Mask Aligner with IR Backside Alignment Quintel acquired by Neutronix
Robotic PR Coater Tracks
Dual Track Coat System
Manual Photoresist Coaters
Manual Photoresist Spin Coater
Manual Photoresist Coaters
Automatic Photoresist Coater System is designed exclusively to coat and bake substrates using spinning and heating techniques.
BLE was acquired by Suss Microtec
Manual Photoresist Developers
System is designed exclusively to develop and bake substrates using spinning and heating techniques
BLE was acquired by Suss Microtec
Mask Aligners: Contact/Proximity
Mask Aligner/Exposure System
Manual Photoresist Developers
Scrubber/Hi Pressure Spray
Standard Photoresist DevTracks
Automatic Two-station Photoresist Coat & Bake Designed to coat and soft bake semiconductor wafers.
Other Lithography Equipment
IR Wafer Aligner Station