Other Etchers
PLASMATHERM UNAXIS DUAL CHAMBER SHUTTLE LOAD LOCK SYSTEM
Shuttle Load Lock System
Mixed Lots Of Plasma Etchers
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Other Etchers
SURFACE TECHNOLOGY SYSTEMS MXP ICP HR
Chlorine Etcher - Year 2003
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Other Etchers
PLASMATHERM RIE PECVD MOUNTED IN GLOVEBOX
Reactive Ion Etch / PECVD system mounted in glovebox with an intregrated air purfier O2 and H20 sensors on board. Both top and bottom electrodes can be powered sequentially.