VERTEQ IPA VAPOR DRYER 200 MM
IPA Vapor Dryer
IPA 2800 is a drying system using isopropyl alcohol to provide a clean,dry surface on wafers and substrates System features a class 10 elevator,ultra-pure nitrogen loading environment, short load-to-vapor time and fast recovery between cycles The system is partical netural at 0.2 microns
This system is NOT a marangoni style