OXFORD INSTRUMENTS PLASMALAB 100 PECVD
Single Chamber PECVD Tools
PECVD TEOS Tool with Load Lock
NB: System needs a computer-software upgrade. Selling this system AS IS, WHERE IS.
1 unit @ Best Price
Make: Oxford Instruments
Model: Plasmalab System 100
Item ID: 181540
Manufacturer | Oxford Instruments |
Model | Plasmalab System 100 |
Description | PECVD TEOS with Load Lock |
Wafer Size Range | |
Maximum | 200 mm |
Process | PECVD & TEOS |
Controller Type | PC Controller Type |
Loadlock | |
Loadlock Yes/No | YES |
Loadlock Pump Manufacturer & Model | Alcatel APT 80 Turbo, ACT 200T Controller |
RF Generator Model | AE LF5 & AE RFX 600A |
Automatch Text | Oxford Instruments |
Number of Gas Inputs | Ten Gas |
Process Gases | See Below |
Other Information | Advanced Energy LF-5--RF Generator |
Power Requirements | 208 V 25.6 A 50/60 Hz 3 Phase |
CE Marked | YES |
Year of Manufacture | 2001 |
Shipping & Handling
Our standard procedure is to service the equipment as orders are placed. Lead times can vary depending on the item.
Domestic and International shipments: Ex Works, Scotia, NY. All freight cost estimates are for dock to dock service only.
Any additional services, i.e. lift-gate, inside or residential delivery, must be requested at the time of sale and will be billed accordingly.
CBI is not responsible for any damage incurred during shipment. It is the buyer's responsibility to inspect packages for damage and to note any damage on bill of lading.
Please feel free to call us with any questions. (Phone: 518.346.8347, 844-833-8347, Fax: 518.381.9578).
Payment
We offer terms of net 30 days to all companies that have established credit with Capovani Brothers Inc. and have paid within terms.
All federal, state, local governments and their agencies, as well as institutions of higher learning automatically receive terms.
All other sales, including foreign sales, are prepayment only.
MasterCard, VISA, Discover and AMEX are accepted at sellers discretion.