Item ID: 181540

**1 Offered at Best Price**

OXFORD INSTRUMENTS PLASMALAB 100 PECVD

PECVD TEOS Tool with Load Lock

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Location: Scotia, New York, United States

Unit Price	Unstated
Number of Units	1
Manufacturer	Oxford Instruments
Model	Plasmalab System 100
Description	PECVD TEOS with Load Lock
Wafer Size Range
Maximum	200 mm
Process	PECVD & TEOS
Controller Type	PC Controller Type
Loadlock
Loadlock Yes/No	YES
Loadlock Pump Manufacturer & Model	Alcatel APT 80 Turbo, ACT 200T Controller
RF Generator Model	AE LF5 & AE RFX 600A
Automatch Text	Oxford Instruments
Number of Gas Inputs	Ten Gas
Process Gases	See Below
Other Information	Advanced Energy LF-5--RF Generator Advanced Energy RFX 600A--RF Generator Process Gases CF4 80%, O2 20%--500 SCCM---MKS 1179A Ar 90%, PH3 10%--50 SCCM---MKS 1479A Ar 90%, GeH4 10%--50 SCCM---MKS 1479A Ar 90%, BeH6 10%--50 SCCM---MKS 1479A N2 95%, SiH4 5%--1 SLM---MKS 1479A NH3 100%--100 SCCM---MKS 1479A N2O 100%--3 SLM---MKS 1179A N2O 100%--200 SCCM MKS 1179A N2 100%--2 SLM MKS 1179A O2 100%--500 SCCM MKS 1179A Refurbishment to include but not limited to the following; Cleaning and recalibration of MFCs Inplace wet cleaning. As option chamber and associated harware can be sent high purity cleaning. System will be fully functional and source inspection to be performed at our facility with inert gases
Power Requirements	208 V 25.6 A 50/60 Hz 3 Phase
CE Marked	YES
Year of Manufacture	2001

Shipping & Handling:

Unless otherwise stated, all items will be fully tested and sold with our standard ninety day warranty, which is described in our terms and conditions.
Our standard procedure is to service the equipment as orders are placed. Lead times can vary depending on the item.
Domestic and International shipments: Ex Works, Scotia, NY. All freight cost estimates are for dock to dock service only.
Any additional services, i.e. lift-gate, inside or residential delivery, must be requested at the time of sale and will be billed accordingly.
CBI is not responsible for any damage incurred during shipment. It is the buyer's responsibility to inspect packages for damage and to note any damage on bill of lading.
Please feel free to call us with any questions. (Phone: 518.346.8347, Fax: 518.381.9578).

Payment:

Minimum order of $50 required.
We offer terms of net 30 days to all companies that have established credit with Capovani Brothers Inc. and have paid within terms.
All federal, state, local governments and their agencies, as well as institutions of higher learning automatically receive terms.
All other sales, including foreign sales, are prepayment only.
MasterCard, VISA, Discover and AMEX are accepted at sellers discretion.

Domestic Terms and Conditions

International Terms and Conditions

FULL DESCRIPTION of Item 181540

**1 Offered at Best Price**

OXFORD INSTRUMENTS PLASMALAB 100 PECVD

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