Other Information | Advanced Energy LF-5--RF Generator Advanced Energy RFX 600A--RF Generator Process Gases CF4 80%, O2 20%--500 SCCM---MKS 1179A Ar 90%, PH3 10%--50 SCCM---MKS 1479A Ar 90%, GeH4 10%--50 SCCM---MKS 1479A Ar 90%, BeH6 10%--50 SCCM---MKS 1479A N2 95%, SiH4 5%--1 SLM---MKS 1479A NH3 100%--100 SCCM---MKS 1479A N2O 100%--3 SLM---MKS 1179A N2O 100%--200 SCCM MKS 1179A N2 100%--2 SLM MKS 1179A O2 100%--500 SCCM MKS 1179A
Refurbishment to include but not limited to the following; Cleaning and recalibration of MFCs Inplace wet cleaning. As option chamber and associated harware can be sent high purity cleaning.
System will be fully functional and source inspection to be performed at our facility with inert gases
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