PLASMATHERM VLR 700
Cluster PECVD Tools
Single Chamber PECVD. Mixed Frequency Deposition
(MFD) Both High Frequency (13.56 MHz) and Low Frequency (50-460 kHz)
RF power delivered both electrodes.
1 unit @ Best Price
Make: Plasma-Therm
Model: VLR 700 VLR-PM1-ICRB-PM
Item ID: 30246
| Manufacturer | Plasma-Therm |
| Model | VLR 700 VLR-PM1-ICRB-PM |
| Wafer Size Range | |
| Minimum | 50 mm |
| Maximum | 200 mm |
| Set Size | 100 mm |
| Number of Chambers | 1 |
| Process Capabilities | Nitride Depostion |
| Chamber 1 Description | 13.5" Electrode
|
| Controller Type | PC Controller Type |
| Temperature Control | T/C |
| External Cooling | Water Cooled |
| Accessories | Leybold Pump Package |
| Other Information | Computer #1 dual boot VxWorks Wind River Systems 5.3.1 BSP version 1.1/1 and Computer #2 NT4, Versaworks 2.5 |
| Year of Manufacture | 1999 |
| Condition | Excellent |
Shipping & Handling
Our standard procedure is to service the equipment as orders are placed. Lead times can vary depending on the item.
Domestic and International shipments: Ex Works, Scotia, NY. All freight cost estimates are for dock to dock service only.
Any additional services, i.e. lift-gate, inside or residential delivery, must be requested at the time of sale and will be billed accordingly.
CBI is not responsible for any damage incurred during shipment. It is the buyer's responsibility to inspect packages for damage and to note any damage on bill of lading.
Please feel free to call us with any questions. (Phone: 518.346.8347, 844-833-8347, Fax: 518.381.9578).
Payment
We offer terms of net 30 days to all companies that have established credit with Capovani Brothers Inc. and have paid within terms.
All federal, state, local governments and their agencies, as well as institutions of higher learning automatically receive terms.
All other sales, including foreign sales, are prepayment only.
MasterCard, VISA, Discover and AMEX are accepted at sellers discretion.