Key Features
•Chamber accommodates 8” (200mm) wafers
•Vacuum system: designed for Ultra High Vacuum (7x10-7 Torr).
•Main: Pfeiffer HiPace 800, 790L/s Turbomolecular pump with VAT
•Load lock: Pfeiffer HiPace 70, 67 L/s turbo pump
•Roughing pump: Edwards NXDS10I Mechanical scroll pump
•Control software and interlocks
•Automated heavy duty linear transfer arm
•Multiple ports and windows
•Multiple gas inlets
•Large central port for induction or other feedthrough
Parts
Chambers (mounted to an extruded aluminum system support frame)
•Main chamber: nominally 30" long x 18" deep x 12" high
•Load Lock: compatible with substrates up to 200mm diameter
Pressure Control
• (1) Fujikin FCST1000F flow controller (0-100 sccm), all cables, and PID upstream pressure control electronics
• (1) Inficon CDG025D Capacitance Manometer 100 mTorr (0.13 mbar) pressure transducer
Transfer arm
• Fully automated high precision heavy duty motion control linear transfer arm (LRP)
