Key Features
•Chamber accommodates 8” (200mm) wafers
•Vacuum system: designed for Ultra High Vacuum (7x10-7 Torr).
•Main: Pfeiffer HiPace 800, 790L/s Turbomolecular pump with VAT
•Load lock: Pfeiffer HiPace 70, 67 L/s turbo pump
•Kurt Lesker EKLIPSE Control software and interlocks
•Automated heavy duty linear transfer arm
•Multiple ports and windows
•Multiple gas inlets
•Large central port for induction or other feedthrough
Parts
Chambers (mounted to an extruded aluminum system support frame)
•Main chamber: nominally 30" long x 18" deep x 12" high
•Load Lock: compatible with substrates up to 200mm diameter
Pressure Control
• (1) Fujikin FCST1000F flow controller (0-100 sccm), all cables, and PID upstream pressure control electronics
• (1) Inficon CDG025D Capacitance Manometer 100 mTorr (0.13 mbar) pressure transducer
Transfer arm
• Fully automated high precision heavy duty motion control linear transfer arm (LRP)
• Substrates are carried in a holder on end effector of LRP t
• Accomodates up to a 200mm (8") diameter substrate in a holder.
• LRP reaches thru Annealing chamber to pick up substrate holder off
of pedestal in Load Lock.
Kurt J. Lesker Company eKLipse™ HMI
(Human Machine Interface) consists of the following components:
eKLipse™ Software
User Interface
Host Application
Controller Hardware/Application
Together, these components give the system operator an interface that provides capabilities such as:
Process automation
Process (recipe) creation
System status
Manual control of the system
Datalogging
Alarms
Password protection
Interlocks
Offline process editing
