Kurt J Lesker Linear Annealing Ultra High Vacuum Research Tool with Load Lock

Key Features

•Chamber accommodates 8” (200mm) wafers

•Vacuum system: designed for Ultra High Vacuum (7x10-7 Torr).

•Main: Pfeiffer HiPace 800, 790L/s Turbomolecular pump with VAT

•Load lock: Pfeiffer HiPace 70, 67 L/s turbo pump

•Kurt Lesker EKLIPSE Control software and interlocks

•Automated heavy duty linear transfer arm

•Multiple ports and windows

•Multiple gas inlets

•Large central port for induction or other feedthrough

Parts

Chambers (mounted to an extruded aluminum system support frame)

•Main chamber: nominally 30" long x 18" deep x 12" high

•Load Lock: compatible with substrates up to 200mm diameter

Pressure Control

• (1) Fujikin FCST1000F flow controller (0-100 sccm), all cables, and PID upstream pressure control electronics

• (1) Inficon CDG025D Capacitance Manometer 100 mTorr (0.13 mbar) pressure transducer

Transfer arm

• Fully automated high precision heavy duty motion control linear transfer arm (LRP)

• Substrates are carried in a holder on end effector of LRP t

• Accomodates up to a 200mm (8") diameter substrate in a holder.

• LRP reaches thru Annealing chamber to pick up substrate holder off

of pedestal in Load Lock.

Kurt J. Lesker Company eKLipse™ HMI

(Human Machine Interface) consists of the following components:

• eKLipse™ Software

• User Interface

• Host Application

• Controller Hardware/Application

• Together, these components give the system operator an interface that provides capabilities such as:

• Process automation

• Process (recipe) creation

• System status

• Manual control of the system

• Datalogging

• Alarms

• Password protection

• Interlocks

• Offline process editing