Advanced Energy LF-5--RF Generator
Advanced Energy RFX 600A--RF Generator
Process Gases
CF4 80%, O2 20%--500 SCCM---MKS 1179A
Ar 90%, PH3 10%--50 SCCM---MKS 1479A
Ar 90%, GeH4 10%--50 SCCM---MKS 1479A
Ar 90%, BeH6 10%--50 SCCM---MKS 1479A
N2 95%, SiH4 5%--1 SLM---MKS 1479A
NH3 100%--100 SCCM---MKS 1479A
N2O 100%--3 SLM---MKS 1179A
N2O 100%--200 SCCM MKS 1179A
N2 100%--2 SLM MKS 1179A
O2 100%--500 SCCM MKS 1179A
NB: System needs a computer-software upgrade. Selling this system AS IS, WHERE IS.
