System will process two cassetts of wafers or devices up to 8" in diameter
System sensors and safety features
Automatic and manual operation
IPA level sensor
IPA Supply low
Cooling water flow
Cooling water temp.
Exhaust air flow loss
N2 pressure loss
Air pressure loss
DI water flow
N2 flow loss
IPA leak detector
Purity limit
IPA Fluid temp.
Fire alarm (Ultra Violet)
Extremely low emissions and alcohol comsumption
System consists of a dryer module and a auxiliary module
Water cooling chiller and vacuum pump not included.
Exhaust Requirements
Vapor module: 100CFM@.25 static pressure (min)
Auxiliary module: 100CFM@.25 static pressure (min)
Exhaust blowers not included
