BALZERS  TPH 2200 TURBO PUMP

Pump Controller

Vacuum Gate Valve

RF Power Supply

Turbo Pump Controller

for DRAG 020 • TPH/U 035 • TMH/U 064/065

Cold Cathode Gauge Controller

Roots Dry Vacuum Pump

BALZERS TCP 040 Turbo Pump Controller

Two Stage Mechanical Vacuum Pump

Pumping speed and ultimate pressure are based on 60 Hz operation.