Load locked single wafer sputter, cassette to cassette vertically mounted for sideways sputter
Currently configured for 100mm wafers 3 Target mini-quantums RF Etch VIPS (Vacuum Isolated Processing Station) Residual Gas Analyzer
Vacuum Chamber
A great core system for a custom project
System sold AS IS
Turbo Pump Turbomolecular pump will be rebuilt to factory specifications.
Diffusion Pump
Pump will be rebuilt at time of sale. Specify desired heater voltage (120/208/240VAC).
Part numbers: 9699554S018 9699554S004 9699554S021
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