Cryogenic Compressor -- Part No.8135900G001 The 9600 Compressor supports either On-Board or Cryo-Torr Cryopumps and multiple cryopump installations

E-Beam Evaporator with Ion Source

Cryopump Note: Pumps to be rebuilt once sold; inquire on lead-time.

Six Pocket Ebeam Gun, (2)Resistance Sources, 6kW Heater Array, 25.5" Bell Jar, Cryo PumpedThe CHA SEC-1000-RAP high-vacuum EBeam deposition system designed for use in production and research environments.

Load locked single wafer sputter, cassette to cassette vertically mounted for sideways sputter Currently configured for 100mm wafers3 Target mini-quantumsRF EtchVIPS (Vacuum Isolated Processing Station)Residual Gas Analyzer

Leak Detector

Dry Helium Leak Detector

Cryo lines Helium Lines for Cryogenic Compressors and PumpsCryo Hoses

E-Beam Deposition System

E Beam Evaporator

Part Number:  8135924G001

Photos are representative

High Volume E Beam Evaporator