Item ID: 119294
TRION TECHNOLOGY DIELECTRIC CLUSTER TOOL
Dielectric Cluster ToolTrion Technology Oracle
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Location: Scotia, NY, United States
Number of Units
Manufacturer Trion Technology
Wafer Size Range Minimum 50 mm
Maximum 200 mm
Set Size 200 mm
Number of Chambers 1
Process Capabilities Oxide Etch
Chamber 1 Description RIE Dielectric EtchPhantom III RIE Reactor
Controller Type PC Controller Type
Elevator Type Brooks Automation VCE 6
Process Gases CF4, CHF3, Ar, O2
Other Information Central VacuumTransport (CVT) PlatformHigh Conductance Plenum and Vacuum SystemManual Wafer Load PortAutomatic Pressure Control600 Watt, 13.56 MHz RF GeneratorDC Bias ControlBrooks Automation VCE6 Vacuum Cassette Elevator(2) Ebara ESR20N 2,000 LPM Dry Pumps,
Power Requirements 208 V
Year of Manufacture 2006
Shipping & Handling:Unless otherwise stated, all items will be fully tested and sold with our standard ninety day warranty, which is described in our terms and conditions. Our standard procedure is to service the equipment as orders are placed. Lead times can vary depending on the item.Domestic and International shipments: Ex Works, Scotia, NY. All freight cost estimates are for dock to dock service only.Any additional services, i.e. lift-gate, inside or residential delivery, must be requested at the time of sale and will be billed accordingly.CBI is not responsible for any damage incurred during shipment. It is the buyer's responsibility to inspect packages for damage and to note any damage on bill of lading.Please feel free to call us with any questions. (Phone: 518.346.8347, Fax: 518.381.9578).
Payment:Minimum order of $50 required.
We offer terms of net 30 days to all companies that have established credit with Capovani Brothers Inc. and have paid within terms.
All federal, state, local governments and their agencies, as well as institutions of higher learning automatically receive terms.
All other sales, including foreign sales, are prepayment only.
MasterCard, VISA, Discover and AMEX are accepted at sellers discretion.
Domestic Terms and Conditions
International Terms and Conditions
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