Item ID: 119294

**1 Offered at Best Price**

TRION TECHNOLOGY DIELECTRIC CLUSTER TOOL

Dielectric Cluster Tool

Trion Technology Oracle

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Location: Scotia, New York, United States

Unit Price	Unstated
Number of Units	1
Manufacturer	Trion Technology
Model	Oracle
Wafer Size Range
Minimum	50 mm
Maximum	200 mm
Set Size	200 mm
Number of Chambers	1
Process Capabilities	Oxide Etch
Chamber 1 Description	RIE Dielectric Etch Phantom III RIE Reactor
Controller Type	PC Controller Type
Elevator Type	Brooks Automation VCE 6
Process Gases	CF4, CHF3, Ar, O2
Other Information	Central Vacuum Transport (CVT) Platform High Conductance Plenum and Vacuum System Manual Wafer Load Port Automatic Pressure Control 600 Watt, 13.56 MHz RF Generator DC Bias Control Brooks Automation VCE6 Vacuum Cassette Elevator (2) Ebara ESR20N 2,000 LPM Dry Pumps,
Power Requirements	208 V 49.0 A 60 Hz 3 Phase
Year of Manufacture	2006

Shipping & Handling:

Unless otherwise stated, all items will be fully tested and sold with our standard ninety day warranty, which is described in our terms and conditions.
Our standard procedure is to service the equipment as orders are placed. Lead times can vary depending on the item.
Domestic and International shipments: Ex Works, Scotia, NY. All freight cost estimates are for dock to dock service only.
Any additional services, i.e. lift-gate, inside or residential delivery, must be requested at the time of sale and will be billed accordingly.
CBI is not responsible for any damage incurred during shipment. It is the buyer's responsibility to inspect packages for damage and to note any damage on bill of lading.
Please feel free to call us with any questions. (Phone: 518.346.8347, Fax: 518.381.9578).

Payment:

Minimum order of $50 required.
We offer terms of net 30 days to all companies that have established credit with Capovani Brothers Inc. and have paid within terms.
All federal, state, local governments and their agencies, as well as institutions of higher learning automatically receive terms.
All other sales, including foreign sales, are prepayment only.
MasterCard, VISA, Discover and AMEX are accepted at sellers discretion.

Domestic Terms and Conditions

International Terms and Conditions

FULL DESCRIPTION of Item 119294

1 Offered at Best Price

TRION TECHNOLOGY DIELECTRIC CLUSTER TOOL

**1 Offered at Best Price**