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FULL DESCRIPTION of Item 201152

in Other Etchers
Item ID: 201152

Offered 1 Offered at Best Price


PLASMATHERM RIE PECVD MOUNTED IN GLOVEBOX

Reactive Ion Etch / PECVD system mounted in glovebox with an intregrated air purfier O2 and H20 sensors on board.

Both top and bottom electrodes can be powered sequentially.


In addition to this Plasma-Therm 790 RIE PECVD 11", Capovani Brothers Inc stocks a wide range of used and refurbished plasma etching equipment including RIE, ICP and DRIE plasma etch tools. Typical manufacturers include Applied Materials, Branson/IPC, LAM Research, March Instruments, Oxford Instruments, Plasma-Therm, Surface Technology Systems, Tegal, and Trion Technology.

To view our complete stock of used plasma etch tools visit our Plasma Etch Equipment categories.

This used plasma etching tool and all the other used and refurbished semiconductor, scientific, and laboratory equipment listed on this website are owned by Capovani Brothers Inc. and stored at our facility in Scotia, NY.

Sell us your used, surplus or idle assets! Send us your surplus list

PLASMATHERM RIE PECVD MOUNTED IN GLOVEBOX
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Location: Scotia, New York, United States
Unit Price Unstated
Number of Units 1
Manufacturer Plasma-Therm
Model 790 RIE PECVD 11"
Process RIE PECVD
Controller Type PC Controller Type
Roughing Pump Leybold D40BCS WSU501
Number of Gas Inputs Seven Gas
Process Gases See below
Accessories 

Single Station Vacuum Atmospheres Omni-Lab Glovebox:

  • Part No: 101965
  • Integrated Air Purifier
  • Trace Oxygen Monitor
  • Trace Moisture Monitor



Other Information 

11" Electrode power switchable between top and bottom electrodes

Gas Manifold
(1) MKS 1479A, 100 SCCM, SiH4
(1) MKS 1179A, 200 SCCM, NH3
(1) MKS 1159B, 100 SCCM, O2
(1) MKS 1179A, 1 SLM, HE
(1) MKS 1179A, 1 SLM, AR
(1) MKS 1179A, 500 SCCM, 82.5% CH4, 17.5% O2
(1) MKS 1479A30322CR1BM, 200 SCCM, C5H12

Power Requirements 208 V     60.0 A     50/60 Hz     3¬†Phase

Shipping & Handling:

Unless otherwise stated, all items will be fully tested and sold with our standard ninety day warranty, which is described in our terms and conditions. 
Our standard procedure is to service the equipment as orders are placed. Lead times can vary depending on the item.
Domestic and International shipments: Ex Works, Scotia, NY. All freight cost estimates are for dock to dock service only.
Any additional services, i.e. lift-gate, inside or residential delivery, must be requested at the time of sale and will be billed accordingly.
CBI is not responsible for any damage incurred during shipment. It is the buyer's responsibility to inspect packages for damage and to note any damage on bill of lading.
Please feel free to call us with any questions. (Phone: 518.346.8347, Fax: 518.381.9578).
 
Payment:

Minimum order of $50 required.
We offer terms of net 30 days to all companies that have established credit with Capovani Brothers Inc. and have paid within terms.
All federal, state, local governments and their agencies, as well as institutions of higher learning automatically receive terms.
All other sales, including foreign sales, are prepayment only.
MasterCard, VISA, Discover and AMEX are accepted at sellers discretion.

Domestic Terms and Conditions

International Terms and Conditions