PLASMATHERM ICP PLASMA ETCHER
Poly/Nitride Etchers
Inductively Coupled Plasma Etcher with 9.5 Inch Electrode
1 unit @ Best Price
Make: Plasma-Therm
Model: 790 ICP
Item ID: 45428
Manufacturer | Plasma-Therm |
Model | 790 ICP |
Wafer Size Range | |
Minimum | 50 mm |
Maximum | 200 mm |
Controller Type | PC Controller Type |
High Vacuum Pump | Leybold 361C |
Roughing Pump | Leybold D40BCS |
RF Generator Model | RFPP RF20M & RF5S |
Automatch Text | RFPP AM-20 & AM-5 |
Number of Gas Inputs | Three Gas |
Process Gases | TBD |
Other Information | The top coil is supplied 2 MHz RF at 1000 watt max. RFPP Model RF20M |
Power Requirements | 208 V 60.0 A 60 Hz 3 Phase |
Year of Manufacture | 1998 |
Refurbished | YES |
Shipping & Handling
Our standard procedure is to service the equipment as orders are placed. Lead times can vary depending on the item.
Domestic and International shipments: Ex Works, Scotia, NY. All freight cost estimates are for dock to dock service only.
Any additional services, i.e. lift-gate, inside or residential delivery, must be requested at the time of sale and will be billed accordingly.
CBI is not responsible for any damage incurred during shipment. It is the buyer's responsibility to inspect packages for damage and to note any damage on bill of lading.
Please feel free to call us with any questions. (Phone: 518.346.8347, 844-833-8347, Fax: 518.381.9578).
Payment
We offer terms of net 30 days to all companies that have established credit with Capovani Brothers Inc. and have paid within terms.
All federal, state, local governments and their agencies, as well as institutions of higher learning automatically receive terms.
All other sales, including foreign sales, are prepayment only.
MasterCard, VISA, Discover and AMEX are accepted at sellers discretion.