ASTEX CHEMICAL DOWNSTREAM PLASMA SOURCE

Other Plasma Processing Equipment and Tools

Chemical Downstream Plasma Source

Applied Materials part number: 3750-0112

2 unit s @ Best Price

Make: Astex

Model: AX 7610

Item ID: 63666

Manufacturer	Astex
Model	AX 7610
Description	Chemical Downstream Plasma Source
Other Information	The AX7610 is a microwave plasma source for downstream chemical etch applications, such as photoresist stripping and hard mask removal. With replaceable quartz or sapphire tubes, the AX7610 downstream source offers flexibility of configuration to meet the most demanding application process parameters. The sapphire tube version is compatible with much more severe CF4 and NF3 chemistries for isotopic etch and other applications. Sapphire Plasma Source Tube P/N FI20101 Applied part number: 3750-0112 Specifications: 2450 MHz Max power output: 3 kW Inert gas fitting: 1/4" VCR Output flange: KF 40 Operating pressure: 2 to 8 Torr Elect requirements: 24VDC 1 Amp Process gas compatibility: O2, N2, H2O, Ar, NF3, CF4, F6, and other Florine based gases
Exterior Dimensions
Width	8.000 in (20.3 cm)
Depth	4.500 in (11.4 cm)
Height	14.500 in (36.8 cm)
Weight	10 lb (5 kg)

Shipping & Handling

Unless otherwise stated, all items will be fully tested and sold with our standard ninety day warranty, which is described in our terms and conditions.

Our standard procedure is to service the equipment as orders are placed. Lead times can vary depending on the item.

Domestic and International shipments: Ex Works, Scotia, NY. All freight cost estimates are for dock to dock service only.

Any additional services, i.e. lift-gate, inside or residential delivery, must be requested at the time of sale and will be billed accordingly.

CBI is not responsible for any damage incurred during shipment. It is the buyer's responsibility to inspect packages for damage and to note any damage on bill of lading.

Please feel free to call us with any questions. (Phone: 518.346.8347, 844-833-8347, Fax: 518.381.9578).

Payment

Minimum order of $50 required.

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Domestic Terms and Conditions

International Terms and Conditions