Source Chamber
18" Dia x 18" High, water cooled, 304 stainless steel
Source Tray
18" Dia flat plate with 10 1" dia. feedthrough ports
1 EMI EMS 7.5V 600A DC Power Supply
Two filament boats - Sequential operation.
Granville Philips 307 Gauge Controller with process control
NB: Substrate domes not included. Film thickness monitor shown not included.