Anatech Hummer 6.6T Sputter System

Item description

Intergal Varian Turbo V70 9699359 turbo pump

Varian 969507S002 turbo pump controller

Motorized stage rotation

Target material previously used: Gold,Palladium,Silver (targets not included)

Target size: 1.3" (Meivac MAK sputtering source)

Power supply:Advanced Energy MDX 500

Stage: 100 mm Dia.

Electrode: Water cooled

Gas: Argon 5 PSI

Coating Method	Sputtering Only
Planar Magnetron Sputter Head	YES
Specimen Capacity	12 SEM Samp
Gas Flow Control	Automatic
Vacuum Metering	Yes
Power Requirements	115 V 10.0 A 50/60 Hz 1 Phase
Year of Manufacture	2005

Diameter	7.75 in (19.69 cm)
Height	12.00 in (30.48 cm)

Working & Warranted
Inspected by Capovani engineers to confirm function. Sold with a 90-day warranty covering function. Warranty terms
Lead time varies, confirmed in your quote
These items are inspected and serviced after your order is confirmed. Typical lead time is 1 to 3 weeks. We’ll confirm exact timing when we send your quote.
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