Intergal Varian Turbo V70 9699359 turbo pump
Varian 969507S002 turbo pump controller
Motorized stage rotation
Target material previously used: Gold,Palladium,Silver (targets not included)
Target size: 1.3" (Meivac MAK sputtering source)
Power supply:Advanced Energy MDX 500
Stage: 100 mm Dia.
Electrode: Water cooled
Gas: Argon 5 PSI
