Robot arm p/n: 002-7090-04
Control module p/n: 002-5870-07
Wafer aligner p/n: 002-7391R07
Control pendant
Cables
NB: Power supply to be supplied by customer, 24V 30A.
Specifications
Radial axis stroke
Range of motion: 32.16 in
Speed: 24 in/sec
Repeatability: 0.003"
Rotational axis
Range of motion:Infinite
Speed: 360 Deg./sec
Repeatability:0.10 Deg.
Z Axis
Range of motion:17.25 in
Speed: 12 in/sec
Repeatability:0.003"
Transfer time: 4.5 sec
Wafer size: 100mm to 300mm
Load capacity: 1.2 Lbs.
Arm:Two link "SCARA" type
Robot configured to application: F4-W3-V53-1-W3, V1.6
