System looks to be complete. The system has not been tested. We did however pull vacuum on the chamber and backfilled with N2 for long term storage. There is documentation including operations manuals, component manuals and software.
System is being sold AS IS, Where Is. No returns. Potential buyers are more than welcome to visit our facility to inspect the equipment prior to purchase.
Specifications:
Wafer size: 150mm
Vacuum Stage:
Travel Range X, Y, & Z: X=150 mm, Y=150mm, Z=12 mm, and Theta = +/- 6°
Accuracy: +10um (44 points of 150 mm cycle area)
Repeatability: +/- 5 um
Resolution: 1 um
Vacuum Chamber:
Chamber heater: Up to 70°C
Vacuum: Up to 5 x 10-5 mbar
Pfeiffer THM 261Turbo Pump
Microscope stage: Travel range: 50 mm x 50 mm x 110 mm
Components:
Pfeiffer T2K400 Chiller
Boeckeler VIA-100 Video Measurement System
Viewing objective: Mitutoyo M plan APO 10x/0.28, F=200
Loading tool and substrate carrier for 100mm substrate
Power requirements: 240 V, 20 A, 60 Hz, 1 Phase
Software:
Windows 2000 Professional, Windows Embedded NT, Windows NT 4.0
Control PC Software: Cryo/Kernel Software version 1.06
Suss ProberBench 5 V 5.06, r 16.12.02
Suss Core Package Cryo PC. V5.06.3, SWO- 125660
Suss Cryo Kernel V1.06
