Mass Range: 1 to 300 amu
Detector Type high-performance combination electron multiplier/Faraday cup (EM/FC)
Resolution: 1 amu wide @ 10% peak height over entire mass range
Base Pressure Performance: 5 x 10-9 Torr ( 6.6 x 10-9 mbar)
Ambient Temperature 20 to 50 Deg C
Relative Humidity: 80%
CVD/Etch Ion Source
Ion Source Conductance: 0.7 l/s (7 x 10-4 m3/s)
Process Pressure Range
Orifice Size (Optimum Pressure)
(defined by orifice diameter in inlet system)
0.01, 0.1, 1, 10, 100 Torr
Minimum Detectable Composition Change:0.2 ppm
TWare32 software p/n 911-339-G3, will work with Windows XP
As of 2015 Inficon is not supporting Tware32 and giving software for free
Foreline pump not included
