Theta 360 degrees continuos
8" vacuum wafer chuck
Wafer chuck parallel to x-y axis to less than 3 microns
Bi directional repeatability: .05 um(X-Y) and .01um(Z)
Focus wheel provides smooth high resolution manual positioning
DC servo motors
Model 4000 controller
GPIB interface card Four axis Cables included
Configured for Reichert Poly Var scope (Can be adapted for many scopes)
