Nexx Systems Cirrus 300 PECVD Using ECR Technology
$55,000.00As-is no return
- Condition
- Used See details
- Brand
- Nexx Systems
- MPN
- Cirrus 300
- SKU
- GID_4603
- Availability
- 1 in stock
Shipping, sale coverage & payments
- Shipping:
- Ships from Scotia, NY. Freight, ready within 3 to 5 business days of order confirmation; you arrange the carrier or we can coordinate it.
- Sale Coverage:
- As-is No Return: No return; final sale. View terms
- International Orders:
- Case by case; export controls may affect eligibility. Contact us
- Payments:
- Credit card via Stripe, or purchase order. Payment Information
- Independent Reseller:
- Capovani is not an authorized distributor or representative of the original manufacturer.
Shop with confidence
Family-owned since 1988. Equipment stocked in Scotia, NY. About Capovani
Item description
This system is designed for the fluorination of DLC surfaces on various substrates.
The ECR zone is produced by a Nd-Fe-B permanent magnet which produces a high magnetic field launch of the microwave energy.
High magnetic field launch produces a highly stable and efficient ECR plasma.
PQ2000 Series permanent magnet low profile ECR source.
ASTeX AX2110 microwave power supply with remote magnetron head.
- Output 150 - 1000 Watt, PC controlled
20 inch outer diameter reactor chamber with Viton seals.
Six (6) MKS Instruments 2179A Kalrez sealed mass flow controllers, expandable to seven.
Wafer Chuck - Handling up to 300mm in diameter
- RF Biased, Via RFPP 1kW, 13.56 Mhz, with automatch
- Recirculating fluid cooling
- Helium backside cooling
- Temperature range -25C to 130C
- Mechanical clamp substrate holder
- NB: Higher temperatures can be achieved without helium backside cooling
- Balzers TMH 1001corrosive service Turbo
- ASTeX AX3060
Condition & testing notes
Previously in service and offered for secondary-market resale.
