Oxford Instruments Plasmalab 100 PECVD TEOS Deposition System Load Locked
- Condition
- For parts See details
- Brand
- Oxford Instruments
- MPN
- Plasmalab 100
- SKU
- GID_2638
- Availability
- 1 in stock
Shipping, sale coverage & payments
- Shipping:
- Ships from Scotia, NY. Freight, ready within 3 to 5 business days of order confirmation; you arrange the carrier or we can coordinate it.
- Sale Coverage:
- As-is No Return: No return; final sale. View terms
- International Orders:
- Case by case; export controls may affect eligibility. Contact us
- Payments:
- Credit card via Stripe, or purchase order. Payment Information
- Independent Reseller:
- Capovani is not an authorized distributor or representative of the original manufacturer.
Shop with confidence
Family-owned since 1988. Equipment stocked in Scotia, NY. About Capovani
Item description
Wafer Size Range Maximum 200 mm
Process: PECVD & TEOS
Controller Type: PC
Loadlock
Loadlock Pump: Alcatel APT 80 Turbo, ACT 200T Controller
RF Generator: Advanced Energy LF5 & Advanced Energy RFX 600A
Ten Process Gas Inputs with MFCs
CF4 80%, O2 20%--500 SCCM---MKS 1179A
Ar 90%, PH3 10%--50 SCCM---MKS 1479A
Ar 90%, GeH4 10%--50 SCCM---MKS 1479A
Ar 90%, BeH6 10%--50 SCCM---MKS 1479A
N2 95%, SiH4 5%--1 SLM---MKS 1479A
NH3 100%--100 SCCM---MKS 1479A
N2O 100%--3 SLM---MKS 1179A
N2O 100%--200 SCCM MKS 1179A
N2 100%--2 SLM MKS 1179A
O2 100%--500 SCCM MKS 1179A
NB: System needs a computer-software upgrade. Selling this system AS IS, WHERE IS.
Condition & testing notes
Inventory intended for repair, parts harvesting, or non-working use cases.
