Suss Microtec Gamma 60 Coating and Developing Cluster Tool
$54,000.0030 day return
- Condition
- Used See details
- Brand
- Suss Microtec
- MPN
- Gamma 60
- SKU
- GID_2564
- Availability
- 1 in stock
Shipping, sale coverage & payments
- Shipping:
- Ships from Scotia, NY. Freight, ready within 3 to 5 business days of order confirmation; you arrange the carrier or we can coordinate it.
- Sale Coverage:
- 30 Day Return: 30-day functional return as listed. View terms
- International Orders:
- Case by case; export controls may affect eligibility. Contact us
- Payments:
- Credit card via Stripe, or purchase order. Payment Information
- Independent Reseller:
- Capovani is not an authorized distributor or representative of the original manufacturer.
Shop with confidence
Family-owned since 1988. Equipment stocked in Scotia, NY. About Capovani
Item description
NB: System is missing the computer and operating system
- (1) Photoresist Develop Stations
- (3) Photoresist Dispenses
- (3) Number of Developer Dispensers
- (2) Number of Developer Rinse Dispensers
- (1) Number of Vapor Prime Hot Plates
- (2) Number of Hot Plates
- (1) Number of Chill Plates
- (3) Number of Cassette Elevators
- Wafer Edge Bead Removal
- Wafer Backside Rinse
- Gencobot IV wafer robot
- (2) Julabo Model F25 Chillers
- System currently for both 2" and 3" substrates.
- Power requirements: 400V, 3 phase, 50/60 Hz.
NB: Transformer can be fitted to customer required voltage.
Condition & testing notes
Previously in service and offered for secondary-market resale.
