Suss MicroTec RESPECT 600 Automatic Photoresist Coater

Item description

400 V 16 A 50 Hz

System features

Programmable controller

PC with windows NT and applications program

Touch screen

RS 232 Interface

Vacuum monitoring

Edge bead removal

Hotplate with vapor prime process

Programmable outlets

External process gas connection

External cabinet exhaust connection

Automatic exhaust control

Media control panel

Step up transformer: 208 to 400 V, 3 phase

Number of Tracks	0
Number of Cassette Elevators	2
Number of Photoresist Coat Stations	1
Wafer Edge Bead Removal	YES
Number of Vapor Prime Hot Plates	1
Number of Hot Plates	1
Number of Chill Plates	0
Power Requirements	208 V 50/60 Hz 3 Phase
CE Marked	YES
Weight	938 lb (425 kg)

Set Size

150 mm

Working & Warranted
Inspected by Capovani engineers to confirm function. Sold with a 90-day warranty covering function. Warranty terms
Lead time varies, confirmed in your quote
These items are inspected and serviced after your order is confirmed. Typical lead time is 1 to 3 weeks. We’ll confirm exact timing when we send your quote.
Logistics confirmed at quotation
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