Technics Micro Stripper Series 200 Plasma System

Item description

DSPC-71 Downstream pressure controller

Stainless steel wafer boat, 25 wafers capacity

Stainless steel tray for small parts

Chamber is air cooled

RF Generator: 200 W 13.56 MHz

Mechanical pump sold separately. Visit Rotary Vacuum Pumps category to select one.

Process	Plasma etch
Controller Type	Microprocessor Controller Type
End Point Detection	Yes
Roughing Pump	10-15 CFM, not included
Automatch Text	Manual or Automatic mode
Number of Gas Inputs	Two Gas
Power Requirements	110/120 V 15.0 A 60 Hz 1 Phase
Operating Air Pressure	60.00 PSI (413,718.00 N/sq m)

Maximum

100 mm

Used

Previously in service and offered for secondary-market resale.

Working & Warranted
Inspected by Capovani engineers to confirm function. Sold with a 90-day warranty covering function. Warranty terms
Lead time varies, confirmed in your quote
These items are inspected and serviced after your order is confirmed. Typical lead time is 1 to 3 weeks. We’ll confirm exact timing when we send your quote.
Logistics confirmed at quotation
Shipping method, cost, and timing are confirmed on your quote before an order is placed. Shipping policy
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