Mill Lane Engineering 4123 Reel Coater

Item description

Advanced Energy ATX-1250 matching network

Advanced Energy ATX-CP control panel

Two MKS type 120A pressure transducers

Two MKS type 270 display units

MKS type 248A upstream pressure control valve

MKS type 250C pressure/flow controller

MKS type 247C four channel mas flow controller

Three MKS type 2159B mass flow control controllers

Granville Phillips type 302 ionization gauge controller with TC and process control modules

Vacuum System	Cryo Pumped
Vacuum System	Two CTI OnBoard 8 Cryopumps Leybold B65 roughing pump
Load Lock Included	No
Target Size	6" x 24"
Quantity of DC Cathodes	2
Number of RF Etch Cathodes	2
Gas Inputs	Three
Gas Input Control	Mass Flow Controllers
Substrate Heaters	No
Residual Gas Analyzer	No
Year of Manufacture	1995

Output Power

30.00 kW DC

Used

Previously in service and offered for secondary-market resale.

Working & Warranted
Inspected by Capovani engineers to confirm function. Sold with a 90-day warranty covering function. Warranty terms
Lead time varies, confirmed in your quote
These items are inspected and serviced after your order is confirmed. Typical lead time is 1 to 3 weeks. We’ll confirm exact timing when we send your quote.
Logistics confirmed at quotation
Shipping method, cost, and timing are confirmed on your quote before an order is placed. Shipping policy
International orders
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