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in Metal Etchers
Item ID: 206582

Offered 1 Offered at Best Price


Reactive Ion Etch System

BatchTop VII

In addition to this Plasma-Therm BT 6" RIE MF, Capovani Brothers Inc stocks a wide range of used and refurbished plasma etching equipment including RIE, ICP and DRIE plasma etch tools. Typical manufacturers include Applied Materials, Branson/IPC, LAM Research, March Instruments, Oxford Instruments, Plasma-Therm, Surface Technology Systems, Tegal, and Trion Technology.

To view our complete stock of used plasma etch tools visit our Plasma Etch Equipment categories.

This used plasma etching tool and all the other used and refurbished semiconductor, scientific, and laboratory equipment listed on this website are owned by Capovani Brothers Inc. and stored at our facility in Scotia, NY.

Sell us your used, surplus or idle assets! Send us your surplus list

  Click to see additional image(s)... other images

Location: Scotia, New York, United States
Unit Price Unstated
Number of Units 1
Manufacturer Plasma-Therm
Model BT 6" RIE MF
Wafer Size Range 
  Maximum 150 mm
Process Reactive Ion Etch System
Controller Type PC Controller Type
High Vacuum Pump Turbo Pump
Roughing Pump Edwards RV 12
RF Generator Model RFPP 5S
Number of Gas Inputs Four Gas
  Number of Chillers 0

Edwards RV 12 mechanical pump

Leybold TurboVac 151 Turbo Pump with NT 150/360 Controller

(1) MKS Model 153 Throttle Valve

(4) MKS Mass Flow Controllers

Computer, monitor, keyboard

Chiller is NOT included

Other Information 

Windows 98 operation system.

See detail photo #37 in "other images" for gases configuration.

System is tested and ready to ship.


Power Requirements 208 V     60 Hz
Exterior Dimensions 
  Width 30.500  in  (77.5 cm)
  Depth 28.000  in  (71.1 cm)
  Height 30.000  in  (76.2 cm)

Shipping & Handling:

Unless otherwise stated, all items will be fully tested and sold with our standard ninety day warranty, which is described in our terms and conditions. 
Our standard procedure is to service the equipment as orders are placed. Lead times can vary depending on the item.
Domestic and International shipments: Ex Works, Scotia, NY. All freight cost estimates are for dock to dock service only.
Any additional services, i.e. lift-gate, inside or residential delivery, must be requested at the time of sale and will be billed accordingly.
CBI is not responsible for any damage incurred during shipment. It is the buyer's responsibility to inspect packages for damage and to note any damage on bill of lading.
Please feel free to call us with any questions. (Phone: 518.346.8347, 844-833-8347, Fax: 518.381.9578).


Minimum order of $50 required.
We offer terms of net 30 days to all companies that have established credit with Capovani Brothers Inc. and have paid within terms.
All federal, state, local governments and their agencies, as well as institutions of higher learning automatically receive terms.
All other sales, including foreign sales, are prepayment only.
MasterCard, VISA, Discover and AMEX are accepted at sellers discretion.

Domestic Terms and Conditions

International Terms and Conditions