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in Standard Photoresist DevTracks
Item ID: 4005

Offered 1 Offered at Best Price


Automatic Two-station
Photoresist Coat & Bake

Designed to coat and soft
bake semiconductor wafers.
  Click to see additional image(s)... other image

Location: Scotia, NY, United States
Unit Price Unstated
Number of Units 1
Manufacturer Solitec
Model 820-CB
Wafer Size Range 
  Minimum 50 mm
  Maximum 150 mm
  Set Size 100 mm
Number of Tracks 1
Number of Hot Plates 1
Controller Type Analog Controller Type
Accessories Solitec 8600 Calibration Module
Other Information System Features and Specifications
  • Resist Uniformity: 75 angstroms, 3 sigma
  • Microprocessor Controlled (10 program capacity)
  • Fast Hot Plate Bake: +/- 1.5ºC uniformity
  • Speed Range: 200-8,000 rpm (solid state servo control)
  • Acceleration Range: programmable from 0-40 krpm/s
  • Hot Plate: up to 300ºC vacuum assisted enclosed bake
  • Beltless Elevators
  • Nitrogen Requirement: 1 connection, 1/4" OD, 60 psi
  • Vacuum Requirement: up to 4 connections, 1/4" OD
  • Year of Manufacture 1988
    Condition Like New
    Operating Air Pressure 60.00  PSI  (413,718.00 N/sq m)
    Vacuum Required 25.00  in Hg  (634.99 mm Hg)
    Exterior Dimensions 
      Width 59.000  in  (149.9 cm)
      Depth 15.500  in  (39.4 cm)
      Height 37.000  in  (94.0 cm)

    Shipping & Handling:

    Unless otherwise stated, all items will be fully tested and sold with our standard ninety day warranty, which is described in our terms and conditions. 
    Our standard procedure is to service the equipment as orders are placed. Lead times can vary depending on the item.
    Domestic and International shipments: Ex Works, Scotia, NY. All freight cost estimates are for dock to dock service only.
    Any additional services, i.e. lift-gate, inside or residential delivery, must be requested at the time of sale and will be billed accordingly.
    CBI is not responsible for any damage incurred during shipment. It is the buyer's responsibility to inspect packages for damage and to note any damage on bill of lading.
    Please feel free to call us with any questions. (Phone: 518.346.8347, 844-833-8347, Fax: 518.381.9578).


    We offer terms of net 30 days to all companies that have established credit with Capovani Brothers Inc. and have paid within terms.
    All federal, state, local governments and their agencies, as well as institutions of higher learning automatically receive terms.
    All other sales, including foreign sales, are prepayment only.
    MasterCard, VISA, and Discover Card are accepted.