Solitec 8600 Calibration Module
System Features and Specifications
Load: automatic cassette to cassette
Beltless Elevator
Cassette: Fluoroware 72 and 82 series
Throughput: ~ 80 wafers/hour
Completely jacketed process lines, valves, and spray heads
Spray or Puddle Develop
Microprocessor Controller (10 program capacity)
Compact Design (footprint occupies < 6 sq ft
Speed Range: 200-8,000 rpm (solid state servo control)
Acceleration Range: programmable from 0-40 krpm/s
Hot Plate: up to 300ºC vacuum assisted enclosed bake
Nitrogen Requirement: 1 connection, 1/4" OD, 60 psi
Vacuum Requirement: up to 4 connections, 1/4" OD
