Solitec 820-PTDB Temperature Controlled Positive Developer

Item description

Solitec 8600 Calibration Module

System Features and Specifications

Load: automatic cassette to cassette

Beltless Elevator

Cassette: Fluoroware 72 and 82 series

Throughput: ~ 80 wafers/hour

Completely jacketed process lines, valves, and spray heads

Spray or Puddle Develop

Microprocessor Controller (10 program capacity)

Compact Design (footprint occupies < 6 sq ft

Speed Range: 200-8,000 rpm (solid state servo control)

Acceleration Range: programmable from 0-40 krpm/s

Hot Plate: up to 300ºC vacuum assisted enclosed bake

Nitrogen Requirement: 1 connection, 1/4" OD, 60 psi

Vacuum Requirement: up to 4 connections, 1/4" OD

Photoresist Type	Positive
Number of Tracks	1
Number of Hot Plates	1
Controller Type	Microprocessor Controller Type
Year of Manufacture	1988
Vacuum Required	25.00 in Hg (634.99 mm Hg)

Working & Warranted
Inspected by Capovani engineers to confirm function. Sold with a 90-day warranty covering function. Warranty terms
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