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in Wafer Transfer Units
Item ID: 43406

Offered 1 Offered at Best Price


Wafer Robot

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Location: Scotia, New York, United States
Unit Price Unstated
Number of Units 1
Manufacturer Brooks Automation
Model VTR5
Description Vacuum Atmosphere Robot

Robot m/n 001-5500-02, p/n 001-1951-05 REV. C13

Other Information 

Wafer size: 100 mm to 200 mm
Load capacity: 1.1 Lbs
Radial axis

  • Range: 211 mm to 735 mm center line of robot
  • Resolution: 0.0001 in
  • Repeat: 0.01 in
    Rotational axis
  • Range: -2.5 Deg to 362.5 Deg
  • Resolution: 0.0009 Deg
  • Repeat: 0.02 Deg
    Z Axis
  • Range: 0.984 in
  • Resolution: 0.00064 in
  • Repeat: 0.001 in
  • Water cooled mounting plate
Condition Very Good

Shipping & Handling:

Unless otherwise stated, all items will be fully tested and sold with our standard ninety day warranty, which is described in our terms and conditions. 
Our standard procedure is to service the equipment as orders are placed. Lead times can vary depending on the item.
Domestic and International shipments: Ex Works, Scotia, NY. All freight cost estimates are for dock to dock service only.
Any additional services, i.e. lift-gate, inside or residential delivery, must be requested at the time of sale and will be billed accordingly.
CBI is not responsible for any damage incurred during shipment. It is the buyer's responsibility to inspect packages for damage and to note any damage on bill of lading.
Please feel free to call us with any questions. (Phone: 518.346.8347, 844-833-8347, Fax: 518.381.9578).


Minimum order of $50 required.
We offer terms of net 30 days to all companies that have established credit with Capovani Brothers Inc. and have paid within terms.
All federal, state, local governments and their agencies, as well as institutions of higher learning automatically receive terms.
All other sales, including foreign sales, are prepayment only.
MasterCard, VISA, Discover and AMEX are accepted at sellers discretion.

Domestic Terms and Conditions

International Terms and Conditions