Other Information | Wafer size: 100 mm to 200 mm Load capacity: 1.1 Lbs Radial axis
- Range: 211 mm to 735 mm center line of robot
- Resolution: 0.0001 in
- Repeat: 0.01 in
Rotational axis
- Range: -2.5 Deg to 362.5 Deg
- Resolution: 0.0009 Deg
- Repeat: 0.02 Deg
Z Axis
- Range: 0.984 in
- Resolution: 0.00064 in
- Repeat: 0.001 in
- Water cooled mounting plate
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