PLASMATHERM RIE PECVD MOUNTED IN GLOVEBOX

Other Etchers

Reactive Ion Etch / PECVD system mounted in glovebox with an intregrated air purfier O2 and H20 sensors on board.

Both top and bottom electrodes can be powered sequentially.

1 unit @ Best Price

Make: Plasma-Therm

Model: 790 RIE PECVD 11"

Item ID: 201152

Manufacturer	Plasma-Therm
Model	790 RIE PECVD 11"
Process	RIE PECVD
Controller Type	PC Controller Type
Roughing Pump	Leybold D40BCS WSU501
Number of Gas Inputs	Seven Gas
Process Gases	See below
Accessories	Single Station Vacuum Atmospheres Omni-Lab Glovebox: Part No: 101965 Integrated Air Purifier Trace Oxygen Monitor Trace Moisture Monitor
Other Information	11" Electrode power switchable between top and bottom electrodes Gas Manifold (1) MKS 1479A, 100 SCCM, SiH4 (1) MKS 1179A, 200 SCCM, NH3 (1) MKS 1159B, 100 SCCM, O2 (1) MKS 1179A, 1 SLM, HE (1) MKS 1179A, 1 SLM, AR (1) MKS 1179A, 500 SCCM, 82.5% CH4, 17.5% O2 (1) MKS 1479A30322CR1BM, 200 SCCM, C5H12
Power Requirements	208 V 60.0 A 50/60 Hz 3 Phase

Shipping & Handling

Unless otherwise stated, all items will be fully tested and sold with our standard ninety day warranty, which is described in our terms and conditions.

Our standard procedure is to service the equipment as orders are placed. Lead times can vary depending on the item.

Domestic and International shipments: Ex Works, Scotia, NY. All freight cost estimates are for dock to dock service only.

Any additional services, i.e. lift-gate, inside or residential delivery, must be requested at the time of sale and will be billed accordingly.

CBI is not responsible for any damage incurred during shipment. It is the buyer's responsibility to inspect packages for damage and to note any damage on bill of lading.

Please feel free to call us with any questions. (Phone: 518.346.8347, 844-833-8347, Fax: 518.381.9578).

Payment

Minimum order of $50 required.

We offer terms of net 30 days to all companies that have established credit with Capovani Brothers Inc. and have paid within terms.

All federal, state, local governments and their agencies, as well as institutions of higher learning automatically receive terms.

All other sales, including foreign sales, are prepayment only.

MasterCard, VISA, Discover and AMEX are accepted at sellers discretion.

Domestic Terms and Conditions

International Terms and Conditions