Plasma-Therm Dual Chamber 8" RIE Reactive Ion Etch System w/ Load Lock

$75,000.00As-is no return

Condition: Used
Brand: Plasma-Therm Unaxis
MPN: 790, Adjustable Electrode
SKU: CID1456
Availability: 1 in stock

Make Inquiry

Item description

System Highlights

Plasma-Therm dual-chamber RIE system
(2) 8" reactive ion etching process chambers
Fixed-gap RIE chamber
Variable-gap RIE chamber
Adjustable electrode gap: approximately 1.25" to 3.25"
Powered upper and lower electrodes on both chambers
Integrated shuttle/load-lock wafer transfer system
Wafer transfer between the two process chambers
(8) MKS MFC gas channels per chamber
(16) MFC channels total
Independent turbomolecular pumping for each chamber
MKS throttle/pressure control
Advanced Energy RF hardware
RF matching/tuning hardware
Pneumatic high-vacuum valves
Integrated Plasma-Therm system controls

Fixed-Gap 8" RIE Chamber

The fixed-gap chamber incorporates an 8" parallel-electrode RIE configuration with powered upper and lower electrodes and its own independent gas delivery and high-vacuum system.

Chamber Configuration

10" electrode
Fixed electrode spacing
Powered upper electrode
Powered lower electrode
Eight independent process-gas channels
MKS 1479A-series Mass-Flo mass flow controllers
Independent turbomolecular vacuum system
Automatic chamber-pressure/throttle control
Stainless-steel high-vacuum plumbing
Pneumatically operated vacuum valves

Fixed Chamber Vacuum System

Seiko Seiki STP-H300C turbomolecular pump
Seiko Seiki STP-H300C controller
MKS 153 throttle valve / pressure-control system
Pneumatically actuated high-vacuum isolation/control valves
Stainless-steel high-vacuum manifold

Process Gas / MFC Configuration

Ar (Argon) - MKS 1479A12CR1AM-S - 100 SCCM
CHF3 (Trifluoromethane) - MKS 1479A22CR1AM-S - 200 SCCM
C2F6 (Hexafluoroethane) - MKS 1479A52CR1AM-S - 500 SCCM
CF4 (Carbon Tetrafluoride) - MKS 1479A12CR1AM-S - 100 SCCM
SF6 (Sulfur Hexafluoride) - MKS 1479A12CR1AM-S - 100 SCCM
He (Helium) - MKS 1479A12CR1AM-S - 100 SCCM
O2 (Oxygen) - MKS 1479A12CR1AM-S - 100 SCCM
O2 (Oxygen) - MKS 1479A12CR1AM-S - 100 SCCM

Adjustable-Gap 8" RIE Chamber

The second RIE chamber incorporates an adjustable electrode assembly that allows the electrode spacing to be varied for process development and optimization.

Chamber Configuration

10" electrode
Manually adjustable electrode gap
Minimum electrode spacing: approximately 1.25"
Maximum electrode spacing: approximately 3.25"
Approximately 2" total adjustment range
Powered upper electrode
Powered lower electrode
Eight independent process-gas channels
MKS 1479A-series Mass-Flo controllers
Independent turbomolecular high-vacuum system
Stainless-steel vacuum plumbing
Pneumatically operated vacuum valves

Adjustable Chamber Vacuum System

BOC Edwards STP-301CB1 turbomolecular pump
STP-301 turbo controller
MKS 153 throttle valve / pressure-control system
Pneumatically actuated high-vacuum isolation/control valves
Stainless-steel high-vacuum manifold
Bellows vacuum connections
Foreline/backing vacuum connections

Process Gas / MFC Configuration

SF6 (Sulfur Hexafluoride) - MKS 1479A12CR1AM-S - 100 SCCM
N2 (Nitrogen) - MKS 1479A22CR1AM-S - 200 SCCM
He (Helium) - MKS 1479A12CR1AM-S - 100 SCCM
CHF3 (Trifluoromethane) - MKS 1479A22CR1AM-S - 200 SCCM
C2F6 (Hexafluoroethane) - MKS 1479A52CR1AM-S - 500 SCCM
CF4 (Carbon Tetrafluoride) - MKS 1479A11CR1AM-S - 10 SCCM
O2 (Oxygen) - MKS 1479A12CR1AM-S - 100 SCCM
Ar (Argon) - MKS 1479A12CR1AM-S - 100 SCCM

Used

Previously in service and offered for secondary-market resale.

It is not tested.

How our listings work

As-is No Return
Sold as listed, based on the description and photos provided. Final sale, no return or refund once purchased. Return Policy
Ships freight
Ready to ship within 3 to 5 business days of order confirmation. You arrange freight. If you don’t have a carrier, contact us and we’ll coordinate it for you. Shipping policy
International orders
Available on a case-by-case basis. Some items may be subject to export control regulations affecting eligibility. Contact us for details.
Payment & purchase orders
Credit card payments via Stripe. Purchase orders accepted. See our Payment Information page for more details.

Plasmatherm 790 RIE Mounted in Omni-Lab Glovebox

SKU: 201152

1 in stock

Plasmatherm 790 RIE Mounted in Omni-Lab Glovebox

Working & Warranted

Request Pricing