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PLASMATHERM BatchTop VII REACTIVE ION ETCH SYSTEM 6"

Metal Etchers

Reactive Ion Etch System

BatchTop VII

1 unit @ Best Price

Make: Plasma-Therm

Model: BT 6" RIE MF

Item ID: 206582

Manufacturer Plasma-Therm
Model BT 6" RIE MF
Wafer Size Range
Maximum 150 mm
Process Reactive Ion Etch System
Controller Type PC Controller Type
High Vacuum Pump Turbo Pump
RF Generator Model RFPP 5S
Number of Gas Inputs Four Gas
Chillers
Number of Chillers 0
Accessories

Mechanical pump not included, sold separately

Leybold TurboVac 151 Turbo Pump with NT 150/360 Controller

(1) MKS Model 153 Throttle Valve

(4) MKS Mass Flow Controllers

Computer, monitor, keyboard

Chiller is NOT included

Other Information

Windows 98 operation system.

See detail photo #37 in "other images" for gases configuration.

System is tested and ready to ship.

Power Requirements 208 V 60 Hz
Exterior Dimensions
Width 30.500 in (77.5 cm)
Depth 28.000 in (71.1 cm)
Height 30.000 in (76.2 cm)
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Shipping & Handling

Unless otherwise stated, all items will be fully tested and sold with our standard ninety day warranty, which is described in our terms and conditions.

Our standard procedure is to service the equipment as orders are placed. Lead times can vary depending on the item.

Domestic and International shipments: Ex Works, Scotia, NY. All freight cost estimates are for dock to dock service only.

Any additional services, i.e. lift-gate, inside or residential delivery, must be requested at the time of sale and will be billed accordingly.

CBI is not responsible for any damage incurred during shipment. It is the buyer's responsibility to inspect packages for damage and to note any damage on bill of lading.

Please feel free to call us with any questions. (Phone: 518.346.8347, 844-833-8347, Fax: 518.381.9578).

Payment

Minimum order of $50 required.

We offer terms of net 30 days to all companies that have established credit with Capovani Brothers Inc. and have paid within terms.

All federal, state, local governments and their agencies, as well as institutions of higher learning automatically receive terms.

All other sales, including foreign sales, are prepayment only.

MasterCard, VISA, Discover and AMEX are accepted at sellers discretion.

Domestic Terms and Conditions

International Terms and Conditions