LAM RESEARCH SIX INCH NITRIDE ETCHER
Poly/Nitride Etchers
Six Inch Nitride Etcher
Automated Cassette to Cassette single wafer etching.
1 unit @ Best Price
Make: LAM Research Co
Model: 490 AUTO ETCH
Item ID: 34890
| Manufacturer | LAM Research Co |
| Model | 490 AUTO ETCH |
| Wafer Size Range | |
| Minimum | 75 mm |
| Maximum | 200 mm |
| Set Size | 150 mm |
| Process | Nitride Etch |
| Controller Type | Microprocessor Controller Type |
| Cassette to Cassette | YES |
| Loadlock | |
| Loadlock Yes/No | YES |
| Loadlock Pump Manufacturer & Model | EBARA A10S |
| Roughing Pump | EBARA A70W |
| RF Generator Model | OEM 650A |
| Automatch Text | ENI 650W 13.56 MHz |
| Number of Gas Inputs | Five Gas |
| Chillers | |
| Number of Chillers | 1 |
| Chiller #1Manufacturer/Model | M&W SYSTEMS RPCE 18A |
| Condition | Very Good |
| Exterior Dimensions | |
| Width | 45.000 in (114.3 cm) |
| Depth | 45.000 in (114.3 cm) |
| Height | 66.000 in (167.6 cm) |
| Weight | 918 lb (416 kg) |
Shipping & Handling
Our standard procedure is to service the equipment as orders are placed. Lead times can vary depending on the item.
Domestic and International shipments: Ex Works, Scotia, NY. All freight cost estimates are for dock to dock service only.
Any additional services, i.e. lift-gate, inside or residential delivery, must be requested at the time of sale and will be billed accordingly.
CBI is not responsible for any damage incurred during shipment. It is the buyer's responsibility to inspect packages for damage and to note any damage on bill of lading.
Please feel free to call us with any questions. (Phone: 518.346.8347, 844-833-8347, Fax: 518.381.9578).
Payment
We offer terms of net 30 days to all companies that have established credit with Capovani Brothers Inc. and have paid within terms.
All federal, state, local governments and their agencies, as well as institutions of higher learning automatically receive terms.
All other sales, including foreign sales, are prepayment only.
MasterCard, VISA, Discover and AMEX are accepted at sellers discretion.