Advanced Energy ATX-1250 matching network
Advanced Energy ATX-CP control panel
Two MKS type 120A pressure transducers
Two MKS type 270 display units
MKS type 248A upstream pressure control valve
MKS type 250C pressure/flow controller
MKS type 247C four channel mas flow controller
Three MKS type 2159B mass flow control controllers
Granville Phillips type 302 ionization gauge controller with TC and process control modules
