Single Station Vacuum Atmospheres Omni-Lab Glovebox
Part No: 101965
Integrated Air Purifier
Trace Oxygen Monitor
Trace Moisture Monitor
11" Electrode power switchable between top and bottom electrodes
Gas Manifold
(1) MKS 1479A, 100 SCCM, SiH4
(1) MKS 1179A, 200 SCCM, NH3
(1) MKS 1159B, 100 SCCM, O2
(1) MKS 1179A, 1 SLM, HE
(1) MKS 1179A, 1 SLM, AR
(1) MKS 1179A, 500 SCCM, 82.5% CH4, 17.5% O2
(1) MKS 1479A30322CR1BM, 200 SCCM, C5H12
