Plasmatherm 790 RIE Mounted in Omni-Lab Glovebox

Item description

Single Station Vacuum Atmospheres Omni-Lab Glovebox

Part No: 101965

Integrated Air Purifier

Trace Oxygen Monitor

Trace Moisture Monitor

11" Electrode power switchable between top and bottom electrodes

Gas Manifold

(1) MKS 1479A, 100 SCCM, SiH4

(1) MKS 1179A, 200 SCCM, NH3

(1) MKS 1159B, 100 SCCM, O2

(1) MKS 1179A, 1 SLM, HE

(1) MKS 1179A, 1 SLM, AR

(1) MKS 1179A, 500 SCCM, 82.5% CH4, 17.5% O2

(1) MKS 1479A30322CR1BM, 200 SCCM, C5H12

Working & Warranted
Inspected by Capovani engineers to confirm function. Sold with a 90-day warranty covering function. Warranty terms
Lead time varies, confirmed in your quote
These items are inspected and serviced after your order is confirmed. Typical lead time is 1 to 3 weeks. We’ll confirm exact timing when we send your quote.
Logistics confirmed at quotation
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