Solitec 820-CB Automatic Photoresist Coat & Bake System

Item description

Solitec 8600 Calibration Module

System Features and Specifications

Resist Uniformity: 75 angstroms, 3 sigma

Microprocessor Controlled (10 program capacity)

Fast Hot Plate Bake: +/- 1.5ºC uniformity

Speed Range: 200-8,000 rpm (solid state servo control)

Acceleration Range: programmable from 0-40 krpm/s

Hot Plate: up to 300ºC vacuum assisted enclosed bake

Beltless Elevators

Nitrogen Requirement: 1 connection, 1/4" OD, 60 psi

Vacuum Requirement: up to 4 connections, 1/4" OD

Working & Warranted
Inspected by Capovani engineers to confirm function. Sold with a 90-day warranty covering function. Warranty terms
Lead time varies, confirmed in your quote
These items are inspected and serviced after your order is confirmed. Typical lead time is 1 to 3 weeks. We’ll confirm exact timing when we send your quote.
Logistics confirmed at quotation
Shipping method, cost, and timing are confirmed on your quote before an order is placed. Shipping policy
International orders
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