Solitec 820-CB Automatic Photoresist Coat & Bake

Name: Solitec 820-CB Automatic Photoresist Coat & Bake
Brand: Solitec
SKU: 4005

Item description

Solitec 8600 Calibration Module

System Features and Specifications

Resist Uniformity: 75 angstroms, 3 sigma

Microprocessor Controlled (10 program capacity)

Fast Hot Plate Bake: +/- 1.5ºC uniformity

Speed Range: 200-8,000 rpm (solid state servo control)

Acceleration Range: programmable from 0-40 krpm/s

Hot Plate: up to 300ºC vacuum assisted enclosed bake

Beltless Elevators

Nitrogen Requirement: 1 connection, 1/4" OD, 60 psi

Vacuum Requirement: up to 4 connections, 1/4" OD

Working & Warranted
Working & Warranted means the item has been inspected by Capovani engineers to confirm functional condition and is sold with a 90 day warranty.
Our standard procedure is to service the equipment as orders are placed. Lead times can vary depending on the item.
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