Vacuum Pumps for Semiconductor Manufacturing

  1. CTI CRYOGENICS CRYOGENIC COMPRESSOR

    Cryogenic Compressors

    CTI CRYOGENICS CRYOGENIC COMPRESSOR

    Cryogenic Compressor -- Part No.8135900G001 The 9600 Compressor supports either On-Board or Cryo-Torr Cryopumps and multiple cryopump installations

  2. CTI CRYOGENICS CRYOPUMP 9,000 L/S

    Cryopumps

    CTI CRYOGENICS CRYOPUMP 9,000 L/S

    Cryopump Note: Pumps to be rebuilt once sold; inquire on lead-time.

  3. EDWARDS ROTARY VANE MECHANICAL VACUUM PUMP 56.5 CFM

    Rotary Vane Pumps

    EDWARDS ROTARY VANE MECHANICAL VACUUM PUMP 56.5 CFM

    Two Stage Mechanical Vacuum Pump

    Pumping speed and ultimate pressure are based on 60 Hz operation.

    Edwards E2M80