Automation and Industrial equipment offerings
Serving  Our Guest    
ALL CATEGORIES   Semiconductor Mfg Eq   Wafer Fabrication Eq   Plasma Processing Eq   Plasma Etch Eq   Parallel Pl Tools   Single Chamber Tools    View LISTINGS    Search-by-Specs   


in Other Etchers
Item ID: 147500

Offered 1 Offered at Best Price


Chlorine Etcher - Year 2003

In addition to this Surface Technology Systems MXP Multiplex ICP HR, Capovani Brothers Inc stocks a wide range of used and refurbished plasma etching equipment including RIE, ICP and DRIE plasma etch tools. Typical manufacturers include Applied Materials, Branson/IPC, LAM Research, March Instruments, Oxford Instruments, Plasma-Therm, Surface Technology Systems, Tegal, and Trion Technology.

To view our complete stock of used plasma etch tools visit our Plasma Etch Equipment categories.

This used plasma etching tool and all the other used and refurbished semiconductor, scientific, and laboratory equipment listed on this website are owned by Capovani Brothers Inc. and stored at our facility in Scotia, NY.

Sell us your used, surplus or idle assets! Send us your surplus list

Location: Scotia, New York, United States
Unit Price Unstated
Number of Units 1
Manufacturer Surface Tech Sys
Model MXP Multiplex ICP HR
Wafer Size Range 
  Minimum 50 mm
  Maximum 200 mm
  Set Size 150 mm
Process Chlorine Etch
  Loadlock Yes/No YES
  Loadlock Pump Manufacturer & Model Edwards E2M40
High Vacuum Pump Pfeiffer MAG 2000
Roughing Pump Edwards IQMB250 & IQDP80
RF Generator Model ENI/ACG-3B and Advanced Energy RFG 3001
Number of Gas Inputs Five Gas
Process Gases BCl3, Cl2, O2, Ar, He
  Number of Chillers 1
  Chiller #1Manufacturer/Model Huber/Unistat 140W

ICP V2 - Balun coil
Mechanical Clamp
Helium Backside Cooling
Carousel in MkIV MPX - 2 x 150mm wafers
3KW Source
300/30W platen
Purge gas line
E-Rack Modules: HCL1 +HCU3 +HCU5+VAC3Y +2x AMC1 +HBC2


Other Information 

Windows 2000
Current Power Requirements: 400V , 50Hz, 40 Amp, 3 phase
Unit can be configured for: 208/460, 60 Hz, 3 Phase. Please request at time of purchase.

CE Marked YES
Year of Manufacture 2003

Shipping & Handling:

Unless otherwise stated, all items will be fully tested and sold with our standard ninety day warranty, which is described in our terms and conditions. 
Our standard procedure is to service the equipment as orders are placed. Lead times can vary depending on the item.
Domestic and International shipments: Ex Works, Scotia, NY. All freight cost estimates are for dock to dock service only.
Any additional services, i.e. lift-gate, inside or residential delivery, must be requested at the time of sale and will be billed accordingly.
CBI is not responsible for any damage incurred during shipment. It is the buyer's responsibility to inspect packages for damage and to note any damage on bill of lading.
Please feel free to call us with any questions. (Phone: 518.346.8347, 844-833-8347, Fax: 518.381.9578).


Minimum order of $50 required.
We offer terms of net 30 days to all companies that have established credit with Capovani Brothers Inc. and have paid within terms.
All federal, state, local governments and their agencies, as well as institutions of higher learning automatically receive terms.
All other sales, including foreign sales, are prepayment only.
MasterCard, VISA, Discover and AMEX are accepted at sellers discretion.

Domestic Terms and Conditions

International Terms and Conditions