VARIAN 3190 SPUTTER SYSTEM
Standalone Sputterers
Load locked single wafer sputter, cassette to cassette vertically mounted for sideways sputter
Currently configured for 100mm wafers
3 Target mini-quantums
RF Etch
VIPS (Vacuum Isolated Processing Station)
Residual Gas Analyzer
1 unit @ Best Price
Make: Varian
Model: 3190
Item ID: 32264
| Manufacturer | Varian |
| Model | 3190 |
| Description | Single Wafer Vertical Sputter System |
| Vacuum System | Cryo Pumped |
| Load Lock Included | Yes |
| Number of RF Etch Cathodes | 1 |
| Substrate Heaters | Yes |
| Residual Gas Analyzer | Yes |
| DC Power Supply | |
| Output Power | 12.00 kW DC |
| RF Generator | |
| Rated Power Output | 1000 Watts |
| Matching Network | Yes |
| Power Requirements | 480 V 22.0 A 60 Hz 3 Phase |
Shipping & Handling
Our standard procedure is to service the equipment as orders are placed. Lead times can vary depending on the item.
Domestic and International shipments: Ex Works, Scotia, NY. All freight cost estimates are for dock to dock service only.
Any additional services, i.e. lift-gate, inside or residential delivery, must be requested at the time of sale and will be billed accordingly.
CBI is not responsible for any damage incurred during shipment. It is the buyer's responsibility to inspect packages for damage and to note any damage on bill of lading.
Please feel free to call us with any questions. (Phone: 518.346.8347, 844-833-8347, Fax: 518.381.9578).
Payment
We offer terms of net 30 days to all companies that have established credit with Capovani Brothers Inc. and have paid within terms.
All federal, state, local governments and their agencies, as well as institutions of higher learning automatically receive terms.
All other sales, including foreign sales, are prepayment only.
MasterCard, VISA, Discover and AMEX are accepted at sellers discretion.