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in Other Wet Process Equipment
Item ID: 7358

Offered 2 Offered at Best Price


Spray Solvent Tool
Refurbished by Rhetech in 2000

Photoresist develop/strip, polymer removal, pre-metal deposition cleaning.
High speed rinse and dry of wafers, with low particle counts and reduced DI water consumption.

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Location: Scotia, New York, United States
Unit Price Unstated
Number of Units 2
Manufacturer Semi-Tool
Model WST 406 MG
Description Spray Solvent Tool

Chemical delivery module.

  • Dual heated chemical tanks, 6 Gal.
  • Dual chemical pumps
  • Chemical waste tank with pump
  • Dual chemical filters
  • All stainless steel construction
Other Information 


  • Front loading with on-axis spin
  • Self-contained fluid dispensing and recirculation
  • System surfaces that come in contact with solvent solutions are stainless steel or Teflon coating
  • System spray and atomizing manifolds provide flexible patterns for fluid delivery
  • Microprocessor controlled process recipes perform system functions
    Model 270 bowl, up to 150mm product
    Rotor installed for 150mm, p/n: A194-60MB-0215
Power Requirements 208 V     30.0 A     50/60 Hz     3¬†Phase
Condition Excellent
Exterior Dimensions 
  Width 48.000  in  (121.9 cm)
  Depth 34.000  in  (86.4 cm)
  Height 62.000  in  (157.5 cm)
Weight 1,315  lb  (596 kg)

Shipping & Handling:

Unless otherwise stated, all items will be fully tested and sold with our standard ninety day warranty, which is described in our terms and conditions. 
Our standard procedure is to service the equipment as orders are placed. Lead times can vary depending on the item.
Domestic and International shipments: Ex Works, Scotia, NY. All freight cost estimates are for dock to dock service only.
Any additional services, i.e. lift-gate, inside or residential delivery, must be requested at the time of sale and will be billed accordingly.
CBI is not responsible for any damage incurred during shipment. It is the buyer's responsibility to inspect packages for damage and to note any damage on bill of lading.
Please feel free to call us with any questions. (Phone: 518.346.8347, 844-833-8347, Fax: 518.381.9578).


Minimum order of $50 required.
We offer terms of net 30 days to all companies that have established credit with Capovani Brothers Inc. and have paid within terms.
All federal, state, local governments and their agencies, as well as institutions of higher learning automatically receive terms.
All other sales, including foreign sales, are prepayment only.
MasterCard, VISA, Discover and AMEX are accepted at sellers discretion.

Domestic Terms and Conditions

International Terms and Conditions