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in Barrel/Box Plasma Etchers
Item ID: 189241

Offered 1 Offered at Best Price


Plasma Etcher

In addition to this Branson/IPC 7102, Capovani Brothers Inc stocks a wide range of used and refurbished plasma etching equipment including RIE, ICP and DRIE plasma etch tools. Typical manufacturers include Applied Materials, Branson/IPC, LAM Research, March Instruments, Oxford Instruments, Plasma-Therm, Surface Technology Systems, Tegal, Trion Technology

To view our complete stock of used plasma etch tools visit our Plasma Etch Equipment categories

This used plasma etching tool and all the other used and refurbished semiconductor, scientific, and laboratory equipment listed on this website are owned by Capovani Brothers Inc. and stored at our facility in Scotia, NY.

Sell us your used, surplus or idle assets! Send us your surplus list

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Location: Scotia, New York, United States
Unit Price Unstated
Number of Units 1
Manufacturer Branson/IPC
Model 7102
Etcher Type Box
Rated Power Output 1000 Watts
Reactor Center Rectangular
Reactor Center Size 
  Width 14.75  in  (37.47 cm)
  Depth 30.00  in  (76.20 cm)
  Height 14.75  in  (37.47 cm)
Reactor Center Material Aluminum
Number of Gas Inputs Two Gas
Automatching Network Included Yes
Vacuum Pump Included No
RF Generator Model ENI Power Systems--Model OEM-12AB-3
Panel Meters Digital
External Cooling Water Cooled

MKS pressure transducer--Type 122A
Seven shelf insert (option), inquire about price and availability
Chamber Part No. - 15699-03--Manufactured 1990
Controller Part No. - 15676-01--Manufactured 1990

Other Information 

RF Generator:

  • 250 V, 20 A, 1 phase
  • Exterior dimensions: 17"W x 16.5"D x 8.25"H
    Front panel digital display has CRT display
    Vacuum connection: KF 40
    Etch tunnel dimensions: 11.5"W x 26"D x 11.5"H
    3" diameter view port in door
Exterior Dimensions 
  Width 25.000  in  (63.5 cm)
  Depth 44.000  in  (111.8 cm)
  Height 44.000  in  (111.8 cm)
Weight 700  lb  (318 kg)

Shipping & Handling:

Unless otherwise stated, all items will be fully tested and sold with our standard ninety day warranty, which is described in our terms and conditions. 
Our standard procedure is to service the equipment as orders are placed. Lead times can vary depending on the item.
Domestic and International shipments: Ex Works, Scotia, NY. All freight cost estimates are for dock to dock service only.
Any additional services, i.e. lift-gate, inside or residential delivery, must be requested at the time of sale and will be billed accordingly.
CBI is not responsible for any damage incurred during shipment. It is the buyer's responsibility to inspect packages for damage and to note any damage on bill of lading.
Please feel free to call us with any questions. (Phone: 518.346.8347, 844-833-8347, Fax: 518.381.9578).


Minimum order of $50 required.
We offer terms of net 30 days to all companies that have established credit with Capovani Brothers Inc. and have paid within terms.
All federal, state, local governments and their agencies, as well as institutions of higher learning automatically receive terms.
All other sales, including foreign sales, are prepayment only.
MasterCard, VISA, Discover and AMEX are accepted at sellers discretion.

Domestic Terms and Conditions

International Terms and Conditions