MKS pressure transducer--Type 122A
Seven shelf insert (option), inquire about price and availability
Chamber Part No. - 15699-03--Manufactured 1990
Controller Part No. - 15676-01--Manufactured 1990
RF Generator
250 V, 20 A, 1 phase
Exterior dimensions: 17"W x 16.5"D x 8.25"H
Front panel digital display has CRT display
Vacuum connection: KF 40
Etch tunnel dimensions: 11.5"W x 26"D x 11.5"H
3" diameter view port in door
