Tepla Plasma Etcher 4000 Watt
- Condition
- Used See details
- Brand
- Tepla
- MPN
- 4011
- SKU
- 181401
- Availability
- 1 in stock
Shipping, sale coverage & payments
- Shipping:
- Ships from Scotia, NY. Method, cost and timing confirmed on your quote. Shipping policy
- Lead Time:
- We’ll confirm exact timing when we send your quote.
- Sale Coverage:
- Working & Warranted: 90-day warranty. View terms
- International Orders:
- Case by case; export controls may affect eligibility. Contact us
- Payments:
- Credit card via Stripe, or purchase order. Payment Information
- Independent Reseller:
- Capovani is not an authorized distributor or representative of the original manufacturer.
Shop with confidence
Family-owned since 1988. Equipment stocked in Scotia, NY. About Capovani
Item description
This Tepla system uses European Power 400v 3phase. Included with this unit is a power supply transfomer that converts US 480 3phase to EURO 400v 3phase needed by this system.
Specification
Process chamber
Material Aluminum
Width 820 mm
Height 138 mm
Depth 706 mm
Chamber door: Aluminum, quartz inspection window with ultraviolet and
high-frequency radiation protection
Vacuum system
Process pressure: Approx. 0.1 - 1 mbar
Gas and vacuum piping: High-grade steel, ¼“ Swagelok connections as well as
aluminum KF components
Gas supply: 2 - 4 separate gas ducts (2 option, metering by means
of mass-flow controller
Venting: By means of solenoid valve and series throttle valve
Vacuum
Ultimate pressure attainable: Approx. 0.01 mbar
Vacuum measurement: Capacitive pressure gauge
measuring range from 0.01 to 10 mbar
The suction system is located in the bottom of the chamber.
Electro-pneumatic valve DN 65 ISO-K in suction line. (Optional)
Dimensions
Height: approx. 1720 mm
Width: approx. 1615 mm
Depth: approx. 950 mm
Weight: approx. 800 kg
Recommended pump equipment
Rotary-vane oil pump, two-stage, filled with PFPE oil
Minimum suction capacity 65 m3 / h
Exhaust filter with oil return
1 meter flexible metal tubing DN 65 ISO-K with connection components
Microwave generator
Regulated Magnetron
Frequency: 2.45 GHz
Power output: 2 x 2000 watts
Fault monitoring: Overload protection
Control unit
Display of
• Process time
• HF output
• Process pressure
• Gas flow
Hardware
• Centronics printer interface
• PC keyboard with Trackball
• RS 232
Software
• Unlimited recipes can be programmed and afterwards automatically
processed and put into memory storage.
• A manual operating mode is available for test purposes.
• Superposing of information or fault message windows
Safety features
• Safety switches on all parts of the housing
• Emergency Off switch
• Defined abortion sequences
• Plasma detection
Technical specifications
| Etcher Type | Planar - Magnetron |
| Rated Power Output | 4000 Watts |
| Reactor Center | Rectangular |
| Reactor Center Material | Aluminum |
| Number of Gas Inputs | Four Gas |
| Automatching Network Included | No |
| Vacuum Pump Included | No |
| RF Generator Model | Muegge MX2000D-110LE |
| External Cooling | Water Cooled |
Reactor Center Size
| Width | 32.28 in (81.99 cm) |
| Depth | 27.80 in (70.61 cm) |
| Height | 5.43 in (13.79 cm) |
Condition & testing notes
Previously in service and offered for secondary-market resale.
