TEPLA PLASMA ETCHER 4000 WATT

Barrel/Box Plasma Etchers

Planar Plasma Etcher

1 unit @ Best Price

Make: Tepla

Model: 4011

Item ID: 181401

Manufacturer	Tepla
Model	4011
Etcher Type	Planar - Magnetron
Rated Power Output	4000 Watts
Reactor Center	Rectangular
Reactor Center Size
Width	32.28 in (81.99 cm)
Depth	27.80 in (70.61 cm)
Height	5.43 in (13.79 cm)
Reactor Center Material	Aluminum
Number of Gas Inputs	Four Gas
Automatching Network Included	No
Vacuum Pump Included	No
RF Generator Model	Muegge MX2000D-110LE
External Cooling	Water Cooled
Accessories	This Tepla system uses European Power 400v 3phase. Included with this unit is a power supply transfomer that converts US 480 3phase to EURO 400v 3phase needed by this system.
Other Information	Specification Process chamber: Material Aluminum Width 820 mm Height 138 mm Depth 706 mm Chamber door: Aluminum, quartz inspection window with ultraviolet and high-frequency radiation protection Vacuum system Process pressure: Approx. 0.1 - 1 mbar Gas and vacuum piping: High-grade steel, ¼“ Swagelok connections as well as aluminum KF components Gas supply: 2 - 4 separate gas ducts (2 option, metering by means of mass-flow controller Venting: By means of solenoid valve and series throttle valve Vacuum Ultimate pressure attainable: Approx. 0.01 mbar Vacuum measurement: Capacitive pressure gauge measuring range from 0.01 to 10 mbar The suction system is located in the bottom of the chamber. Electro-pneumatic valve DN 65 ISO-K in suction line. (Optional) Dimensions: Height: approx. 1720 mm Width: approx. 1615 mm Depth: approx. 950 mm Weight: approx. 800 kg Recommended pump equipment Rotary-vane oil pump, two-stage, filled with PFPE oil Minimum suction capacity 65 m3 / h Exhaust filter with oil return 1 meter flexible metal tubing DN 65 ISO-K with connection components Microwave generator Regulated Magnetron Frequency: 2.45 GHz Power output: 2 x 2000 watts Fault monitoring: Overload protection Control unit Display of: • Process time • HF output • Process pressure • Gas flow Hardware: • Centronics printer interface • PC keyboard with Trackball • RS 232 Software: • Unlimited recipes can be programmed and afterwards automatically processed and put into memory storage. • A manual operating mode is available for test purposes. • Superposing of information or fault message windows Safety features: • Safety switches on all parts of the housing • Emergency Off switch • Defined abortion sequences • Plasma detection

Shipping & Handling

Unless otherwise stated, all items will be fully tested and sold with our standard ninety day warranty, which is described in our terms and conditions.

Our standard procedure is to service the equipment as orders are placed. Lead times can vary depending on the item.

Domestic and International shipments: Ex Works, Scotia, NY. All freight cost estimates are for dock to dock service only.

Any additional services, i.e. lift-gate, inside or residential delivery, must be requested at the time of sale and will be billed accordingly.

CBI is not responsible for any damage incurred during shipment. It is the buyer's responsibility to inspect packages for damage and to note any damage on bill of lading.

Please feel free to call us with any questions. (Phone: 518.346.8347, 844-833-8347, Fax: 518.381.9578).

Payment

Minimum order of $50 required.

We offer terms of net 30 days to all companies that have established credit with Capovani Brothers Inc. and have paid within terms.

All federal, state, local governments and their agencies, as well as institutions of higher learning automatically receive terms.

All other sales, including foreign sales, are prepayment only.

MasterCard, VISA, Discover and AMEX are accepted at sellers discretion.

Domestic Terms and Conditions

International Terms and Conditions