Leybold LAB 600EB E-Beam Evaporator with Ion Source

Name: Leybold LAB 600EB E-Beam Evaporator with Ion Source
Brand: Leybold
SKU: 36660

Item description

Chamber: 23"W x 23"D x 29"H

E-gun: ESV14 with 4 pocket crucible

Ion source: Commonwealth Mark II

Commonwealth N2000 Neutralizer power supply

Model 5000 hollow cathode electron source

Leybold IC5 deposition controller

Lebyold EGC28 electron beam evaporator controller

Dual crystal sensor

PLC+PC visualization

Schnider E-Technik Hi voltage power supply

Brooks Instrument 0151E Flow controller

GWK recirculating chiller

Polycold chiller m/n 552

Planetary for (15)-2" wafers

Extra planetary see photo

Vacuum System: Turbo Pumped
Vacuum System: Leybold Turbovac T1600 pump/controllerEdwards QDP40 dry pumpLeybold Ruvac WSU251
Load Lock Included: No
Gas Inputs: Two
Gas Input Control: Mass Flow Controllers
Film Thickness Monitor: Yes
CE Marked: YES
Year of Manufacture: 2001
Weight: 1,480 lb (671 kg)

Working & Warranted
Working & Warranted means the item has been inspected by Capovani engineers to confirm functional condition and is sold with a 90 day warranty.
Our standard procedure is to service the equipment as orders are placed. Lead times can vary depending on the item.
Secure, flexible payment
Card and invoice payments through Stripe, plus purchase orders and offline payment options.